Hitachi SU3900 Scanning Electron Microscope (SEM) – Key Specifications & Features
The Hitachi SU3900 is a high-performance variable-pressure SEM designed for flexible, high-resolution imaging of a wide range of materials — from geological samples to industrial materials and biological specimens.
Imaging Performance
- Secondary Electron (SE) Resolution: as fine as 3.0 nm at 30 kV (high vacuum), and 15 nm at 1 kV.
- Backscattered Electron (BSE) Resolution: ~4.0 nm at 30 kV (low vacuum).
- Magnification Range: ×5 to ×300 000 (image capture), up to ×800 000 actual display magnification.
- Accelerating Voltage: Variable from 0.3 kV to 30 kV, enabling both high-resolution and low-voltage imaging.
Sample Capability
- Specimen Chamber: Large chamber accommodating samples up to 300 mm in diameter and 130 mm in height.
- Weight Capacity: Up to 5 kg without tilt/rotation.
- Stage: Motorised 5-axis stage with continuous eucentric rotation and tilt from -20° to +90°, enabling comprehensive sample orientation.
Detectors & Modes
- Standard Detectors:
- Secondary Electron Detector (SE) – for surface morphology
- High-sensitivity Backscattered Electron Detector (BSE) – for compositional contrast
- Optional Detectors:
- Energy-Dispersive X-ray Spectrometer (EDS) and other analytical add-ons
- Vacuum Modes: High vacuum and controlled/variable pressure (6–650 Pa), enabling imaging of non-conductive samples without coating.
Additional Features
- SEM MAP & Navigation Tools: Integrated optical SEM MAP and stage navigation functions for locating regions of interest quickly.
- Automated Functions: Auto-focus, auto alignment, and intelligent filament monitoring to streamline imaging and extend filament life.
